Contributions to Proceedings:
T. Nichol, F. Puschitz, F. Bleicher:
"Piezoelectic Controlled Sub-Micrometer Machining Station";
in: "Annals of DAAAM for 2009 & Proceedings of the 20th International DAAAM Symposium "Intelligent Manufacturing & Automation: Focus on Theory, Practice and Education"",
B. Katalinic (ed.);
issued by: DAAAM International Vienna;
DAAAM International Vienna,
Wien,
2009,
ISBN: 978-3-901509-70-4,
1769
- 1770.
English abstract:
This paper presents a method for machining on a sub-micrometer length scale using purely mechanical forces. Piezoelectric actuators are used to position a micro end mill tool within the working space. Closed loop control of the tool position is implemented using LVDT probes with precision on the order of 10 nm. This micromachining technique presents opportunities for tribological research with materials and geometries previously inaccessible by existing methods of micromanufacturing.
Keywords:
Micromachining, piezoelectric actuator, surface microstructure, tribology, lotus effect.
Electronic version of the publication:
http://publik.tuwien.ac.at/files/PubDat_179386.docx
Created from the Publication Database of the Vienna University of Technology.